Micro- and Nanotechnology II
5 credits
Reading list, Master's level, 1TE018
A revised version of the reading list is available.
Main group 1
- Hsu, Tai-Ran, MEMS and microsystems: design, manufacture, and nanoscale engineering, 2. ed., Hoboken, N.J., John Wiley, c2008
- Sze, S. M., Semiconductor devices: physics and technology, 2. ed., New York, Wiley, cop. 2002