Applied Plasma
Syllabus, Bachelor's level, 1TE212
- Code
- 1TE212
- Education cycle
- First cycle
- Main field(s) of study and in-depth level
- Technology G2F
- Grading system
- Fail (U), Pass (3), Pass with credit (4), Pass with distinction (5)
- Finalised by
- The Faculty Board of Science and Technology, 15 June 2012
- Responsible department
- Department of Electrical Engineering
Learning outcomes
Completing the course the students should be able
- to set feasible criteria on the plasma-assisted processes
- to assess relations between the process and properties of the treated surface and/or material
- to make estimation of process parameters and plasma characteristics
- to select a proper reactor design and suitable means of generation
- to assess suitability of individual kinds of plasma for application in materials and surface engineering, in biotechnology, in nanobio applications and in environmental technologies
- to evaluate commercial equipment with respect to different plasma-assisted technologies
Content
Plasma-assisted technologies, general attributes. Generation of gas discharge plasmas. Basic plasma diagnostics. Generation of vapour species, their transport and interaction with surfaces. Selection criteria on the process. Principles and design of conventional and new plasma sources. Afterglow reactors. Microwave ECR and hybrid plasmas. Fundamentals of radical- and ion-assisted plasma chemistry. Hybrid processes. Cold atmospheric and subatmospheric discharges and their applications. New trends in plasma technology.
Instruction
Lectures, demonstrations and project seminars.
Assessment
Compulsory assignments and short tests during the course, and written and oral presentation of project work at the end of the course.