Applied Plasma

7.5 credits

Syllabus, Bachelor's level, 1TE212

A revised version of the syllabus is available.
Code
1TE212
Education cycle
First cycle
Main field(s) of study and in-depth level
Technology G2F
Grading system
Fail (U), Pass (3), Pass with credit (4), Pass with distinction (5)
Finalised by
The Faculty Board of Science and Technology, 21 January 2013
Responsible department
Department of Electrical Engineering

Entry requirements

60 credits in science/engineering including a basic course in electromagnetism or solid state physics.

Learning outcomes

Completing the course the students should be able

- to set feasible criteria on the plasma-assisted processes

- to assess relations between the process and properties of the treated surface and/or material

- to make estimation of process parameters and plasma characteristics

- to select a proper reactor design and suitable means of generation

- to assess suitability of individual kinds of plasma for application in materials and surface engineering, in biotechnology, in nanobio applications and in environmental technologies

- to evaluate commercial equipment with respect to different plasma-assisted technologies

Content

Plasma-assisted technologies, general attributes. Generation of gas discharge plasmas. Basic plasma diagnostics. Generation of vapour species, their transport and interaction with surfaces. Selection criteria on the process. Principles and design of conventional and new plasma sources. Afterglow reactors. Microwave ECR and hybrid plasmas. Fundamentals of radical- and ion-assisted plasma chemistry. Hybrid processes. Cold atmospheric and subatmospheric discharges and their applications. New trends in plasma technology.

Instruction

Lectures, demonstrations and project seminars.

Assessment

Compulsory assignments and short tests during the course, and written and oral presentation of project work at the end of the course.

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